ADVANCED MATERIALS AND TECHNOLOGY


Patent Trees for Planar Systems, Inc.

Patterning Technology for Color Flat-Panel Displays

A Patent Tree is a graphical display of knowledge dissemination from patented technological advances produced during an ATP-funded project. Some companies file for and are granted patents derived from their ATP project. Many of these patents are later referenced by other companies, thereby increasing the potential impact of the ATP project to propel the technology forward.


Patent trees for Status Report 93-01-0054 were generated during December 2004.



Patent Trees Listed by:
Patent

 		Patent Number

 		Company



    		• “Ultra-low particle semiconductor method”
    (No. 5,634,978: filed November 14, 1994; granted June 3, 1997)

    		5,634,978

         		YieldUP International



    		• “Method for cleaning and drying a semiconductor wafer”
    (No. 5,571,337: filed May 9, 1995; granted November 5, 1996)

    		5,571,337

         		YieldUP International



    		• “Ultra-low particle semiconductor cleaner”
    (No. 5,772,784: filed November 8, 1995; granted June 30, 1998)

    		5,772,784

         		YieldUP International



    		• “Ultra-low particle semiconductor apparatus”
    (No. 5,685,327: filed August 8, 1996; granted November 11, 1997)

    		5,685,327

         		YieldUP International



    		• “Method and apparatus for cleaning wafers using multiple tanks”
    (No. 5,849,104: filed September 19, 1996; granted December 15, 1998)

    		 5,849,104

         		YieldUP International



    		• “Ultra-low particle semiconductor cleaner”
    (No. 5,868,150: filed May 22, 1997; granted February 9, 1999)

    		 5,868,150

         		YieldUP International



    		• “Ultra-low particle semiconductor cleaner”
    (No. 5,878,760: filed May 22, 1997; granted March 9, 1999)

    		5,878,760

         		YieldUP International



    		• “Ultra-low particle disk cleaner”
    (No. 5,873,947: filed August 6, 1997; granted February 23, 1999)

    		 5,873,947

         		YieldUP International



    		• “Ultra-low particle semiconductor cleaner”
    (No. 5,891,256: filed December 29, 1997; granted April 6, 1999)

    		 5,891,256

         		YieldUP International



    		• “Cleaning and drying photoresist coated wafers”
    (No. 5,932,027: filed January 12, 1998; granted August 3, 1999)

    		 5,932,027

         		YieldUP International